Two articles, one in QST (January 2018) and one in the IEEE Spectrum https://spectrum.ieee.org/semiconductors/devices/the-high-school-student-whos-building-his-own-integrated-circuits describe how Sam Zeloof, KD2ENL, age 17, has built his own semiconductor fabrication facility following suggestions from Jeri Ellsworths YouTube channel https://www.youtube.com/user/jeriellsworth, where she demonstrated how she had made some home-brew silicon transistors. Sam is using a 10 micrometer feature size, well below the current state of the art. However, surplus equipment for that feature size is available inexpensively. He has built a few transistors and is targeting building a 4004 CPU as his next project.